<?xml version="1.1" encoding="utf-8"?>
<article xsi:noNamespaceSchemaLocation="http://jats.nlm.nih.gov/publishing/1.1/xsd/JATS-journalpublishing1-mathml3.xsd" dtd-version="1.1" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"><front><journal-meta><journal-id journal-id-type="publisher-id">ME</journal-id><journal-title-group><journal-title>Modern Engineering</journal-title></journal-title-group><issn>2996-6973</issn><eissn>2996-6981</eissn><publisher><publisher-name>Art and Design</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.61369/ME.2025030040</article-id><article-categories><subj-group subj-group-type="heading"><subject>Article</subject></subj-group></article-categories><title>气相催化氟化合成一氟甲烷的反应条件优化研究</title><url>https://artdesignp.com/journal/ME/2/3/10.61369/ME.2025030040</url><author>闫浩,郭一博,陈晓勇,孟庆森,杨振建,孙风娟,徐振生,马舜</author><pub-date pub-type="publication-year"><year>2025</year></pub-date><volume>2</volume><issue>3</issue><history><date date-type="pub"><published-time>2025-03-20</published-time></date></history><abstract>一氟甲烷作为半导体行业中不可或缺的含氟蚀刻气体，展示出独特的应用价值。本研究对铬基催化剂采用了X射线衍射（XRD）、比表面积测定（BET）、X射线光电子能谱（XPS）分析及NH3程序升温脱附（NH3-TPD）等手段进行深入表征，明晰了催化剂的晶体结构、比表面积特性、表面铬元素的化学态及其酸性特征。细致探究反应温度、停留时间及原料比例（n(HF)/n(CH3Cl)）等关键因素对氟化反应效率的影响，本研究旨在探索一种生态友好型的一氟甲烷制备技术。实验数据表明，在反应温度设定为290℃、停留时间设为10秒、且原料配比n(HF)/n(CH3Cl)等于10的条件下，一氟甲烷的产率达到了最优水平。</abstract><keywords>一氟甲烷,气相催化,反应条件优化,铬基催化剂</keywords></article-meta></front><body/><back><ref-list><ref id="B1" content-type="article"><label>1</label><element-citation publication-type="journal"><p>[1]何红振, 张冲, 宋新巍, 等. 一氟甲烷的合成与纯化研究进展[J/OL]. 化学推进剂与高分子材料, 2022, 20(6): 13-24.&amp;nbsp;[2]耿谦, 张琴, 姚刚. 一氟甲烷制备与提纯技术研究进展[J]. 低温与特气, 2022, 40(2): 5-8.&amp;nbsp;[3]唐浩东, 周楠, 张庆, 等. 一种Pd-M合金负载型催化剂制备一氟甲烷的方法: CN109824473B [P/OL]. 2022-03-01.&amp;nbsp;[4]刘武灿, 张金柯, 金佳敏, 等. 一种一氟甲烷的制备方法: CN104016829A[P/OL].&amp;nbsp;[5]闫浩, 周晓猛, 郭一博, 等. 一种氟化合成一氟甲烷的方法: CN118851862A[P/OL].&amp;nbsp;[6]张奎, 林德荣, 杨青, 等. 使用新型催化剂制备氟甲烷的新方法: CN112939726A[P/OL].&amp;nbsp;[7]张呈平, 杨刚, 郭占英, 等. 一氟烷烃的制备方法[P/OL]. 2022-03-01.&amp;nbsp;[8]杨刚, 贾晓卿, 权恒道. 一种从烷基醚气相制备氟代烷烃的方法: CN107739293A[P/OL].&amp;nbsp;[9]李金龙, 耿谦, 徐海云, 等. 一种一氟甲烷的制备方法: CN112898114A[P/OL].&amp;nbsp;[10]Method for manufacturing methyl fluoride: 9919990[P/OL]. 2018-03-20.&amp;nbsp;[11]ZHU Y, FIEDLER K, R&amp;Uuml;DIGER St, 等 . Aliovalent-substituted chromium-based catalysts for the hydrofluorination of tetrachloroethylene[J/OL]. Journal of Catalysis, 2003, 219(1): 8-16.&amp;nbsp;[12]BOESE O, UNGER W E S, KEMNITZ E, 等 . Active sites on an oxide catalyst for F/Cl-exchange reactions: X-ray spectroscopy of fluorinated &amp;gamma;-Al2O3[J/OL]. Physical Chemistry Chemical Physics, 2002, 4(12): 2824-2832.&amp;nbsp;[13]ALONSO C, MORATO A, MEDINA F, 等 . Effect of the aluminium fluoride phase for the Cl/F exchange reactions in CCl2F2 (CFC-12) and CHClF2 (HCFC-22)[J/OL]. Applied Catalysis B: Environmental, 2003, 40(4): 259-269.&amp;nbsp;[14]KRISHNA MURTHY J, GROSS U, R&amp;Uuml;DIGER S, 等 . Mixed metal fluorides as doped Lewis acidic catalyst systems: a comparative study involving novel high surface area metal fluorides[J/OL]. Journal of Fluorine Chemistry, 2004, 125(6): 937-949.&amp;nbsp;[15]汪云, 张文霞, 宋建冬, 等. Cr2O3催化剂催化氟化2-氯-1,1,1-三氟乙烷合成四氟乙烷[J]. 有机氟工业, 2018(2 vo): 5-10.&amp;nbsp;[16]HE J, ZHANG M, ZHOU B, 等 . Catalytic Gas‐phase Fluorination of Hexachlorobutadiene to 1,2‐Dichlorotetrafluorocyclobutene over Cr/Zn‐based Catalysts[J/OL]. Journal of the Chinese Chemical Society, 2018, 65(6): 760-770.</p><pub-id pub-id-type="doi"/></element-citation></ref></ref-list></back></article>
